Thermal Wave Analysis (Variable Temperature)
（Measures thermal diffusion coefficients in direction of film thickness） |
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ai-Phase
(Titech venture company) |
ai-Phase Mobile 2 |
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Temperature range |
Room Temperature〜200℃ |
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Temperature frequency |
0. 02 Hz〜2 kHz |
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Thermal diffusivity range
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1.0 x 10-8
〜 5.0 x 10-4 m2/s
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